G06200 - SEMI G62 - 銀めっきの試験方法 StdTpc-Equipment - Facilities Interface This Standard was technically approved

This Standard was technically approved by the Flat Panel Display – Color Global Technical Committee

The purpose of this document is to provide a guide for evaluation of chemical-mechanical polishing (CMP) processes of thin films on unpatterned silicon substrates

as technology advances to smaller and smaller dimensions for the elements of high density integrated circuits

本安全ガイドラインは，汚染除去および汚染除去に関連して残留する危険を文書化するための最低基準を説明する。

SEMI M20-92 (technical revision)

G06200 - SEMI G62 - 銀めっきの試験方法 StdTpc-Equipment - Facilities Interface This Standard was technically approvedglobal Assembly & Packaging Technical Committee201171global Audits and Reviews Subcommittee20118www. semiviews. org www. semi. org199520023 : Referenced SEMI Standards SEMI G55 Test Method for Measurement of Silver Plating Brightness SEMI G56 Test Method for Measurement of Silver Plating Thickness