S02700 - SEMI S27 - 環境，健康，安全（ESH）評価報告書の内容に関する安全ガイドライン Revision:SEMI S27-0310 - Inactive NOTICE: Paragraphs entitled ‘NOTE:’ are

NOTICE: Paragraphs entitled ‘NOTE:’ are not an official part of this Standard and are not intended to modify or supersede the official Standard

チューブと評価されているチューブフィッティングの間のシールのみ，本ドキュメントの適用範囲内である。他の全ての装着シールは本ドキュメントの適用範囲外である。

The Test Method is focused only and specifically on near edge geometry applications

This Guide is intended to address the application of adapter plates for process equipment cluster tools and single module process equipment whose installation requirements are typically complex (e

this Specification intends neither to exclude nor to limit the possibility that suppliers and end-users might test with chemicals other than UPW or with other temperature conditions and

S02700 - SEMI S27 - 環境，健康，安全（ESH）評価報告書の内容に関する安全ガイドライン Revision:SEMI S27-0310 - Inactive NOTICE: Paragraphs entitled ‘NOTE:’ areNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Environmental Health & Safety Global Technical Committee20091216global Audits and Reviews Subcommittee20102www. semi. org NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current