PV08800 - SEMI PV88 - 惰性气体熔融红外吸收法测定光伏多晶硅中氢含量的测试方法 Revision:Default Title thickness and surface condition

thickness and surface condition

SEMI E6 — Guide for Semiconductor Equipment Installation Documentation

While explicit details are given for germanium and silicon

SEMI E14 — Measurement of Particle Contamination Contributed to the Product from the Process or Support Tool

It is published and sold separately on this page

PV08800 - SEMI PV88 - 惰性气体熔融红外吸收法测定光伏多晶硅中氢含量的测试方法 Revision:Default Title thickness and surface conditionNOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. %, m m0. 0001 mg2. 5 mg1 g0. 00001% (m m)0. 2500% (m m)0. 15 g0. 00007% (m m)1. 666% (m m)0. 0001 mg1. 0 mg1 g0. 00001% (m m)0. 1000% (m m)0. 15 g0. 00007% (m m)0. 666% (m m)0. 00008 mg2. 5 mg1 g0. 000008% (m m)0. 2500% (m m)0. 15 g0. 00006% (m