MS01000 - SEMI MS10 - Test Method to Measure Fluid Permeation Through MEMS Packaging Materials StdVol-Flat Panel Display lubricants

lubricants

module manufacturing or frontend/backend manufacturing—however it is not limited to these areas of application

In neither case shall the gas be considered as of higher quality than that defined by the specification

SEMI S2-1016a (delayed revision)

マスフローデバイスで使用される際のガスを順番に並べた参照表となる，半導体産業で使用されるガスに番号を付けた表を提供すること。この表あるいはリストはデジタルマスフローデバイスの製作および使用を簡単にする。

MS01000 - SEMI MS10 - Test Method to Measure Fluid Permeation Through MEMS Packaging Materials StdVol-Flat Panel Display lubricants1 Purpose 1. 1 Microelectromechanical systems (MEMS) are miniaturized systems requiring packaging for environmental protection and for interaction with the external environment. While there is a wide range of MEMS devices, a fairly common need is for packaging that allows movement of some of the internal subcomponents of the device during operation. This is in contrast to the typical integrated circuit that requires only that the device be protected