P02000 - SEMI P20 - EBレジストパラメータのカタログ公表のガイドライン（提案） StdTpc-Photovoltaic SEMI E113-1101 (first published)

SEMI E113-1101 (first published)

• To define key specifications for EUV substrates that ensure physical dimensional compatibility with EUV carriers

Controls and Emergency Actions

本ドキュメントにおける計量の標準単位としては，国際単位系（SI）が使用される。U

Quarterly global semiconductor materials report covering 10 years of historical revenue and a 2-year forecast

P02000 - SEMI P20 - EBレジストパラメータのカタログ公表のガイドライン（提案） StdTpc-Photovoltaic SEMI E113-1101 (first published)NOTICE: This translation is a REFERENCE COPY ONLY. If differences should exist between the English version and a translation in any other language, the English version is the official and authoritative version. SEMI SEMI Global Micropatterning CommitteeJapanese Micropatterning Committee2003428Japanese Regional Standards Committee20036www. semi. org200371992 NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to