E15300 - SEMI E153 - Specification for AMHS SEM (AMHS SEM) Revision:SEMI E153-1109 - Superseded hereinafter collectively referred to as

hereinafter collectively referred to as CC-Link IE

This Document covers requirements for all grades of argon used in the semiconductor industry

of fiducial notches on silicon wafers fall within specified limits

6  This Guide also provides a measurement procedure for local bow

Knowledge of near-edge geometrical properties can help the producer and consumer determine if the dimensional characteristics of a specimen wafer satisfy given geometrical requirements

E15300 - SEMI E153 - Specification for AMHS SEM (AMHS SEM) Revision:SEMI E153-1109 - Superseded hereinafter collectively referred to asThis Standard establishes a Specific Equipment Model (SEM) for automated material handling system (AMHS) (AMHS SEM). The model consists of equipment characteristics and behaviors that are to be implemented in addition to the SEMI E30 fundamental requirements and selected additional capabilities. The intent of this Standard is to facilitate the integration of AMHS SEM equipment into an automated (e. g., semiconductor fabrication) factory. This Document